质量流量计（匹配相应控制器）（jj24000185）采购公告
· 2024-04-15
| 项目名称 | 质量流量计（匹配相应控制器） | 项目编号 | JJ24000185 |
|---|---|---|---|
| 公告开始日期 | 2024-04-15 14:37:27 | 公告截止日期 | 2024-04-18 15:00:00 |
| 采购单位 | 东北大学 | 付款方式 | |
| 联系人 | 联系电话 | ||
| 签约时间要求 | 到货时间要求 | 签约后3个工作日内 | |
| 预算总价 | 105000.0 | ||
| 收货地址 | 钢铁楼308 | ||
| 供应商资质要求 | 符合《政府采购法》第二十二条规定的供应商基本条件
| ||
采购清单
| 采购商品 | 采购数量 | 计量单位 | 所属分类 |
|---|---|---|---|
| 质量流量计（匹配相应控制器） | 7 | 台 | 其他专用仪器仪表 |
| 品牌 | Brooks |
|---|---|
| 型号 | 5850E |
| 技术参数及配置要求 | Standard Ranges:3 sccm to 30 slpm* (Nitrogen equivalent)*Standard temperature and pressure in accordance with SEMI(Semiconductor Equipment and Materials International) standard:0°Cand 101.3 kPa(760 Torr).Accuracy:±1% full scale including linearity at calibration conditions.±1.5% full scale including linearity for flow ranges greater than 20 slpm.Repeatability:0.25% of rateResponse Time:Less than 3 seconds response to within 2% of full scale final value with a 0to 100% command step.Power Requirements(NC Valve):+15 Vdc ±5%,35 mA-15 Vdc ±5%,180 mA3.5 watts power consumptionPower Requirements(NO Valve):+15 Vdc ±5%,215 mA-15 Vdc ±5%,180 mA11.85 watts power consumptionAmbient Temperature Limits:Operating:40°F to 150°F (5°C to 65°C)Non-operating: -13°F to +212F (-25C to 100°C)Working Pressure:1500 psi (10.342 mPa) maximumDifferential Pressure:5 to 50 psi (minimum pressure drop depends on gas and range). Refer toOrifice Sizing, Section 4-6.Output Signal:0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV.5 Volt Reference Output:5 Volts ±0.2%. Maximum load 1 k ohms.Temperature Sensitivity:Zero: less than ±0.075% F.S. per degree C.Span: less than ±1.0% F.S. shift over 10-50°C rangePower Supply Sensitivity:±0.09% full scale per % power supply voltage variationMounting Attitude Sensitivity:±0.5% maximum full scale deviation after re-zeroingCommand Input:0-5 Vdc. Input resistance 200 k ohmLeak Integrity:1 x10-9Atm.cc/sec HeliumControl Range:50 to 1Mechanical Connection:Compatible with most popular mass flow controllers. Refer to Figure 2-1.Electrical Connection:Card edge, 20 terminals, gold over low stress nickel plated copper.15-pinD-Connector(DA-15P) |
| 售后服务 |
文章推荐：
质量流量计（匹配相应控制器）（jj24000185）采购公告
更多商机查看，下载保标APP
扫码关注小程序，获取商机更容易
